4H-SiC Electrostatic Microactuator with Optically Controlled Actuation

Author

Feng Zhao, Missouri University of Science and TechnologyFollow
Marcus Daniel Trimble

Abstract

This paper presents that actuation of a 4H-SiC electrostatic micro actuator was controlled by an optical signal. The micro actuator was monolithically integrated with a transistor switch on the 4H-SiC substrate. DC voltage bias on the transistor produced an electrostatic force on the micro actuator, which bended down the cantilever beam and caused a shift in the resonant frequency to a lower value. The transistor switched on when activated by UV illumination, and photogenerated current in the transistor reduced bias voltage on the micro actuator, which relaxed the electrostatic force and consequently increased the resonant frequency.

Recommended Citation

F. Zhao and M. D. Trimble, "4H-SiC Electrostatic Microactuator with Optically Controlled Actuation," Microsystem Technologies, vol. 23, no. 12, pp. 5631 - 5634, Springer, Dec 2017.

The definitive version is available at https://doi.org/10.1007/s00542-017-3305-0

Department(s)

Electrical and Computer Engineering

Comments

Shell United States, Grant ECCS-1307237

International Standard Serial Number (ISSN)

0946-7076

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2025 Springer, All rights reserved.

Publication Date

01 Dec 2017