Temperature-dependent Optical Properties of AlN Thin Films by Spectroscopy Ellipsometry

Author

Yao Liu
Ehsan Ghafari
Xiaodong Jiang
Yining Feng
Zhe Chuan Feng
Ian T. Ferguson, Missouri University of Science and TechnologyFollow
Na Lu

Abstract

In this work, temperature-dependent optical properties of a series of AlN thin films with different thickness are studied by spectroscopic ellipsometry (SE) ranging from 300 to 825K. The fitted refractive index at 300K is in good agreement with the reported by others, which confirms the high accuracy of the optical model used in this work. The degradation of the absorption properties and the decrease of the bandgap become more pronounced with temperature increases above 475K. A larger change of bandgap at elevated temperature is observed for the thinner AlN epi-layer (300nm) than the thicker ones (404nm). This can be attributed to the poor surface morphologies and crystal qualities in the thinner AlN epi-layer.

Recommended Citation

Y. Liu et al., "Temperature-dependent Optical Properties of AlN Thin Films by Spectroscopy Ellipsometry," MRS Advances, vol. 2, no. 5, pp. 323 - 328, Springer; Materials Research Society, Jan 2017.

The definitive version is available at https://doi.org/10.1557/adv.2017.171

Department(s)

Electrical and Computer Engineering

Comments

National Natural Science Foundation of China, Grant 61367004

Keywords and Phrases

III-V; optical properties; thin film

International Standard Serial Number (ISSN)

2059-8521

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2024 Springer; Materials Research Society, All rights reserved.

Publication Date

01 Jan 2017