Self-Powered Wireless Sensor Node Enabled by an Aerosol-Deposited PZT Flexible Energy Harvester

Abstract

A piezoelectric aerosol-deposited (AD) Pb(Zrx,Ti1-x)O3 (PZT) film prepared with single-step deposition and postannealing was successfully utilized to fabricate a high-performance flexible piezoelectric harvester via a fast, simple, and cost-effective method. The high temperature-annealed AD PZT thick film on a rigid sapphire substrate was transferred onto a flexible substrate by the inoranic-based laser lift-off process. The flexible PZT harvester can convert a maximum output voltage of 200 V and a current signal of 35 ÎœA from biomechanical bending motions, which are comparable to those of a similar interdigitated electrode-type flexible single-crystal energy harvester. The high-output performance of the energy harvester originates from the large grain growth of the PZT ceramic film under the high temperature annealing process at 900°C, which leads to outstanding piezoelectric harvesting properties with robust endurance for up to around 115,000 bending cycles on a flexible substrate.

Department(s)

Electrical and Computer Engineering

Research Center/Lab(s)

Electromagnetic Compatibility (EMC) Laboratory

Keywords and Phrases

aerosol-deposited PZT; energy harvesting; piezoelectric films; self-powered devices; wireless sensor nodes

International Standard Serial Number (ISSN)

1614-6832

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2016 Wiley-VCH Verlag, All rights reserved.

Publication Date

01 Jul 2016

Link to Full Text

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