Abstract

Plasma polymerization of methane in a magnetically enhanced capacitively coupled bell jar reactor operating at a frequency of 10 kHz is reported. Dependence of polymer deposition rate on monomer feed rate (F), composite power parameter (W/FM), electrode temperature, and electrode cleanliness have been examined. Such functional properties as wettability, adhesion, and thermal stability of the polymer are found to depend on the composite power parameter (W/FM) of the plasma. The permeability studies indicate highly crosslinked nature of the polymer. ESCA studies reveal code position of electrode material with the polymer under high W/FM conditions, potential applications of plasma polymer of methane are suggested. Copyright © 1989 John Wiley & Sons, Inc.

Department(s)

Chemistry

Publication Status

Full Access

International Standard Serial Number (ISSN)

1097-4628; 0021-8995

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2023 Wiley, All rights reserved.

Publication Date

01 Jan 1989

Included in

Chemistry Commons

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