Phase-Resolved Depth Profiling of Thin-Layered Plasma Polymer Films by Step-Scan Fourier Transform Infrared Photoacoustic Spectroscopy

Abstract

After reviewing the background of step-scan interferometric photoacoustic spectroscopy, this paper describes a step-scan Fourier transform photoacoustic phase-resolved technique and its applications in depth profiling of micrometerthick layered plasma poly-mers. In particular, the power of direct use of the photoacoustic phase spectrum in both qualitative and quantitative depth profiling of the layered samples is extensively discussed. The effects of both spatial origin and intensity of a photoacoustic signal on its phase have been explicitly analyzed for both overlapping and distinctive, nonoverlapping, bands of the thin-layered plasma polymer samples. The phase spectrum technique is shown to be a very effective and efficient method of spectral depth profiling analysis.

Department(s)

Chemical and Biochemical Engineering

Keywords and Phrases

Depth profiling; Phase-resolved spectroscopy; Photoacoustic spectroscopy (PAS); Plasma polymers; Step-scan FT-IR

International Standard Serial Number (ISSN)

0003-7028

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2024 SAGE Publications; Optica Publishing Group, All rights reserved.

Publication Date

01 Jan 1997

Link to Full Text

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