The Structure and Properties of Amorphous Indium Oxide


A series of In2O3 thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-tocrystalline transition and the structure of amorphous In2O3 were investigated by grazing angle X-ray diffraction (GIXRD), Hall transport measurement, high resolution transmission electron microscopy (HRTEM), electron diffraction, extended X-ray absorption fine structure (EXAFS), and ab initio molecular dynamics (MD) liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InOx polyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structure-property relationship.



Research Center/Lab(s)

Center for High Performance Computing Research

Keywords and Phrases

Crystalline Materials; Deposition; Extended X Ray Absorption Fine Structure Spectroscopy; Film Growth; High Resolution Transmission Electron Microscopy; Indium; Molecular Dynamics; Pulsed Laser Deposition; X Ray Absorption; X Ray Diffraction; Ab Initio Molecular Dynamics; Amorphous Indium-Oxide; Amorphous Oxides; Extended X-Ray Absorption Fine Structures; Grazing Angle X-Ray Diffraction; Structure and Properties; Structure Property Relationships; Transport Measurements; Amorphous Films

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Document Type

Article - Journal

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© 2014 American Chemical Society (ACS), All rights reserved.

Publication Date

01 Jan 2014