Abstract
A practical example of the use of single-structure diffusion pumping groups in an experiment requiring hydrocarbon-free, ultrahigh vacuum is presented. With the use of proper vacuum procedures and careful foreline design and operation, but with no exotic hardware or liquid nitrogen, we have demonstrated that such a pump could provide vacuum that was "clean," i.e., which had no residual pump-oil contamination to a partial pressure below 10 -8 mbar. Their use is thus compatible, at least in peripheral vacuum chambers, with standard "UHV-surface science" processes. We discuss our vacuum system in detail, and present a review of the literature on the production of clean vacua with diffusion pumps. © 1994, American Vacuum Society. All rights reserved.
Recommended Citation
T. J. Gay et al., "Clean Ultrahigh Vacuum System with Single-Structure Diffusion Pumps," Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 12, no. 5, pp. 2903 - 2910, American Vacuum Society; American Institute of Physics, Jan 1994.
The definitive version is available at https://doi.org/10.1116/1.578963
Department(s)
Physics
Publication Status
Available Access
International Standard Serial Number (ISSN)
1520-8559; 0734-2101
Document Type
Article - Journal
Document Version
Final Version
File Type
text
Language(s)
English
Rights
© 2024 American Vacuum Society; American Institute of Physics, All rights reserved.
Publication Date
01 Jan 1994
