Abstract

A metasurface integrated microbolometer having a sensing layer (e.g., SixGeyOI-x-y ). The presence of the metasurface provides selectivity with respect to wavelength, polarization and angle-of-incidence. The presence of the metasurface into the microbolometer affects conversion of electromagnetic to thermal energy, thermal response, electrical integration of the micro bolometer, and the tradeoff between resistivity and temperature coefficient of resistance, thereby allowing the ability to obtain a sensing with high temperature coefficient of resistance with lower resistivity values than that of films without the metasurface. The presence of the metasurface removes the need for a Fabry-Perot cavity.

Department(s)

Mechanical and Aerospace Engineering

Comments

Docket Number: 18UMC-059-MST

Filing Date: 04/17/2019

Issue Date: 09/14/2021, FY22

References Cited

U.S. Patent Documents:

8,629,398 B2 * 1/2014 Talghader…............G01J 5/08 250/338.4

2010/0148067 A1 * 6/2010 Cheon…..........G01J 5/02 250/338.1

2014/0111844 A1 * 04/2014 Puscasu...............H01Q 15/0066 359/245

2018/0067041 A1 * 3/2018 Ogawa...............H01L 37/02

Prior Publication Data:

US 2020/0025619 A1 January 23, 2020

Patent Application Number

16/387,514

Patent Number

US 11,118,981 B2

Document Type

Patent

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2026 The Curators of the University of Missouri, All rights reserved

Additional Rights Information

Assignee: The Curators of the University of Missouri, Columbia, Missouri (US)

Publication Date

14 September, 2021

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