Surface-Enhanced Raman Scattering Microchip Fabricated by Femtosecond Laser
Abstract
We report a surface-enhanced Raman scattering (SERS) microchip that is capable of measuring SERS signals of liquid samples with high sensitivity. The microdevice is an integration of a silicon-based SERS substrate, a multimode optical fiber (MMF), and a microchannel embedded in the photosensitive glass fabricated by the femtosecond laser followed by thermal treatment, wet etching, and annealing. The performance of the SERS microchip is evaluated by measuring rhodamine 6G using a 632.8nm He-Ne laser at 4.3mW excitation power, which reveals that the detection limit is lower than 10 -10M at a 1s short accumulation time.
Recommended Citation
C. Lin et al., "Surface-Enhanced Raman Scattering Microchip Fabricated by Femtosecond Laser," Optics Letters, vol. 35, no. 17, pp. 2937 - 2939, Optical Society of America, Jan 2010.
The definitive version is available at https://doi.org/10.1364/OL.35.002937
Department(s)
Mechanical and Aerospace Engineering
Second Department
Electrical and Computer Engineering
International Standard Serial Number (ISSN)
0146-9592
Document Type
Article - Journal
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2010 Optical Society of America, All rights reserved.
Publication Date
01 Jan 2010