Advances in Femtosecond Laser Fabrication of Microchannels

Author

Hai-Lung Tsai, Missouri University of Science and TechnologyFollow
X.-L. Yan
S.-M. Wang
B. Xia
P.-J. Liu
L. Jiang

Abstract

Major progresses in mechanism investigations and methodology developments in femtosecond laser fabrication of microchannels are reviewed, especially for femtosecond laser irradiation followed by chemical etching and liquid-assisted femtosecond laser drilling. In addition, key challenges and possible future research trends are briefly discussed.

Recommended Citation

H. Tsai et al., "Advances in Femtosecond Laser Fabrication of Microchannels," Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology, Beijing Institute of Technology, Jan 2012.

Department(s)

Mechanical and Aerospace Engineering

Keywords and Phrases

Femtosecond Laser; Microchannel; Modification

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2012 Beijing Institute of Technology, All rights reserved.

Publication Date

01 Jan 2012