A Method to Fabricate 2D Nanoparticle Arrays

Author

Cheng-Hsiang Lin
Lan Jiang, Missouri University of Science and TechnologyFollow
Yen-Hsin Chai
Hai Xiao, Missouri University of Science and TechnologyFollow
Shean-Jen Chen
Hai-Lung Tsai, Missouri University of Science and TechnologyFollow

Editor(s)

Stuke, Michael

Abstract

This article demonstrates an efficient approach to fabricate nanoparticles arranged in a periodic pattern over a large area. A nanoscale gold film coated on a silicon wafer substrate was sectioned into grids by focused ion beam machining. Through a thermal treatment, the film in a confined area transforms into a nanoparticle due to the surface tension effect of the melted gold film. By controlling the film thickness and the size of the confined area, a nanoparticle array with various particle sizes and interparticle spacings can be manipulated. This approach may have great potential applications in sensor chips and nonlinear devices.

Recommended Citation

C. Lin et al., "A Method to Fabricate 2D Nanoparticle Arrays," Applied Physics A: Materials Science and Processing, Springer Verlag, Jan 2010.

The definitive version is available at https://doi.org/10.1007/s00339-010-5552-0

Department(s)

Mechanical and Aerospace Engineering

Second Department

Electrical and Computer Engineering

International Standard Serial Number (ISSN)

0947-8396

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2010 Springer Verlag, All rights reserved.

Publication Date

01 Jan 2010