Laser Thermal Processing of Nanoparticles for Micro/nano Electronics

Abstract

Laser thermal sintering and annealing of nanoparticles for electronics fabrication have been demonstrated for a variety of applications including thin film transistors, transparent conductive layer and photovoltaics. Laser thermal processing is capable of delivering high processing temperature while maintaining surrounding/substrate at much lower temperature. Additionally, it has the advantages of being highly precise and scalable. In this article, several applications of laser thermal processing of nanoparticles will be reviewed. Different types of lasers have been applied to process semiconductors and ceramic nanoparticles. Fundamental understanding of nanoparticle sintering and coalescence process under laser irradiation will be discussed in conjunction with numerical simulation and experimental measurement. The article is concluded by discussion on future development and applications of laser processing of nanoparticles.

Department(s)

Mechanical and Aerospace Engineering

Keywords and Phrases

Electronics; Laser; Manufacturing; Micro; Nano; Nanoparticles; Sintering

International Standard Book Number (ISBN)

978-163439723-0

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2024 Curran Associates, Inc., All rights reserved.

Publication Date

01 Jan 2014

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