Abstract

This study proposes a rear-surface ablation enhancement approach to fabricate high-aspect-ratio microchannels by temporally shaping femtosecond laser pulse trains. in the case study of K9 glass, enhancements of up to a 56 times higher material removal rate and a three times greater maximum drilling depth are obtained by the proposed method, as compared with conventional femtosecond laser drilling at the same processing parameters. the improvements are due to the changes of photon-electron interactions by shaping femtosecond pulse train, which can effectively adjust the photon absorption and localized transient material properties by changing electron dynamics such as free electron densities. © 2012 Optical Society of America.

Department(s)

Mechanical and Aerospace Engineering

Second Department

Electrical and Computer Engineering

Publication Status

Open Access

International Standard Serial Number (ISSN)

1539-4794; 0146-9592

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2024 Optica Publishing Group, All rights reserved.

Publication Date

15 Jul 2012

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