Abstract

In tapping mode atomic force microscopy, surface features are measured indirectly via the amplitude of the tapping cantilever. a change in surface profile is detectable only if it results in an amplitude change that is significant enough to be measured by the optics. Previous works have focused on improving sensitivity through the system's Q-factor, either by changing physical cantilever properties or using feedback control, but those approaches undesirably slow down the dynamic response. in this work we take a novel approach to sensitivity amplification by reshaping the tapping trajectory. by shaping the trajectory so that the probe spends a greater portion of each period close to the sample, where nonlinear forces is strongest, the amplitude sensitivity can be altered. a two harmonic trajectory is considered, and standard feed forward control techniques are employed to generate the desired cantilever drive signal. Simulation results are included and benchmarked against previous literature using standard methods. the results demonstrate that measurement sensitivity can be improved by a significant amount. © 2010 IFAC.

Department(s)

Mechanical and Aerospace Engineering

Comments

Missouri University of Science and Technology, Grant None

Keywords and Phrases

Atomic force microscopy; Bi-harmonic; Sensitivity; Tapping mode

International Standard Book Number (ISBN)

978-390266176-0

International Standard Serial Number (ISSN)

1474-6670

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2024 Elsevier, All rights reserved.

Publication Date

01 Jan 2010

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