The Influence of Residual Stress on Micromachine Stiction of a Stiff Circular Plate
Abstract
The notorious coupling of adhesion and residual membrane stress on the bridge of a MEMS-RF-switch and its effects on suction failure are investigated. the previous model [1] of a thin flexible circular membrane with zero stiffness is here extended to thick stiff plate under bending. the mechanics of a film delaminating from a substrate is rigorously constructed based on an energy balance. Copyright © 2005 by ASME.
Recommended Citation
M. F. Wong et al., "The Influence of Residual Stress on Micromachine Stiction of a Stiff Circular Plate," Proceedings of the World Tribology Congress III - 2005, pp. 247 - 248, American Society of Mechanical Engineers, Jan 2005.
The definitive version is available at https://doi.org/10.1115/wtc2005-63280
Department(s)
Mechanical and Aerospace Engineering
International Standard Book Number (ISBN)
978-079184201-0
Document Type
Article - Conference proceedings
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2024 American Society of Mechanical Engineers, All rights reserved.
Publication Date
01 Jan 2005
