Abstract
This paper reports an experimental study of the elastic deformation of a 200 μm thick microfabricated square membrane with sides ranging from 8.5 mm to 15 mm as indented by a fine cylindrical, flat-ended punch with diameter 500 μm in the presence of long-range intersurface forces. an apparatus was constructed to allow simultaneously measurements of the indenter displacement and the applied force. a number of interesting phenomena such as the "jump-into-contact" and the "pull-off" between the membrane and the moving cylinder were observed. a simple theoretical analysis using linear elasticity was adopted to fit the load-displacement curve (compliance) and thus estimated the Young's modulus of the membrane. the measured parameters are consistent with data reported in literature. © 2004 American Institute of Physics.
Recommended Citation
B. F. Ju et al., "Indentation of a Square Elastomeric Thin Film by a Flat-Ended Cylindrical Punch in the Presence of Long-Range Intersurface Forces," Journal of Applied Physics, vol. 96, no. 11, pp. 6159 - 6163, American Institute of Physics, Dec 2004.
The definitive version is available at https://doi.org/10.1063/1.1812822
Department(s)
Mechanical and Aerospace Engineering
Publication Status
Available Access
International Standard Serial Number (ISSN)
0021-8979
Document Type
Article - Journal
Document Version
Final Version
File Type
text
Language(s)
English
Rights
© 2024 American Institute of Physics, All rights reserved.
Publication Date
01 Dec 2004
