Micrometer-Accuracy 2D Displacement Interferometer with Plasmonic Metasurface Resonators

Abstract

In this Letter, a high-accuracy, two-dimensional displacement sensor is proposed, designed, and demonstrated based on the concept of an extrinsic Fabry–Perot Interferometer. The sensor is composed of two bundled single-mode optic fibers in parallel and two plasmonic metasurface resonators inscribed on a gold substrate via a focused ion beam. The fiber end surface and the metasurface are in parallel with a small cavity between. The cavity change or Z-component displacement is determined from the pattern of interference fringes. The X-component displacement, perpendicular to the Z component, is identified from wavelength-selective metasurface resonators, which possess unique resonant wavelengths due to different nanostructure designs. The sensor was calibrated with six displacements applied through a three-axis precision linear stage. Test results indicated that the proposed interferometer can measure displacements with a maximum error of 5.4 µm or 2.2%.

Department(s)

Mechanical and Aerospace Engineering

Second Department

Civil, Architectural and Environmental Engineering

Research Center/Lab(s)

INSPIRE - University Transportation Center

Comments

National Science Foundation, Grant 1653032

International Standard Serial Number (ISSN)

1671-7694

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2020 Optical Society of America (OSA), All rights reserved.

Publication Date

01 Dec 2020

PubMed ID

33258840

Link to Full Text

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