Low-Cost, Large-Area Patterning of Metasurfaces with Off-Axis Microsphere Photolithography
Recommended Citation
C. Qu and E. C. Kinzel, "Low-Cost, Large-Area Patterning of Metasurfaces with Off-Axis Microsphere Photolithography," Proceedings of the Materials Research Society Fall Meeting (2016, Boston, MA), Materials Research Society (MRS), Dec 2016.
Meeting Name
Materials Research Society Fall Meeting, MRS (2016: Nov. 27-Dec. 2, Boston, MA)
Department(s)
Mechanical and Aerospace Engineering
Research Center/Lab(s)
Intelligent Systems Center
Document Type
Article - Conference proceedings
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2016 Materials Research Society (MRS), All rights reserved.
Publication Date
02 Dec 2016
