Force Modeling and Control of SiC Monocrystal Wafer Processing

Author

S. Li
S. Du
A. Tang
Robert G. Landers, Missouri University of Science and TechnologyFollow
Y. Zhang

Recommended Citation

S. Li et al., "Force Modeling and Control of SiC Monocrystal Wafer Processing," Journal of Manufacturing Science and Engineering, vol. 137, no. 6, American Society of Mechanical Engineers (ASME), Dec 2015.

The definitive version is available at https://doi.org/10.1115/1.4029432

Department(s)

Mechanical and Aerospace Engineering

International Standard Serial Number (ISSN)

1087-1357

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2015 American Society of Mechanical Engineers (ASME), All rights reserved.

Publication Date

01 Dec 2015