Force Modeling and Control of SiC Monocrystal Wafer Processing
Recommended Citation
S. Li et al., "Force Modeling and Control of SiC Monocrystal Wafer Processing," Journal of Manufacturing Science and Engineering, vol. 137, no. 6, American Society of Mechanical Engineers (ASME), Dec 2015.
The definitive version is available at https://doi.org/10.1115/1.4029432
Department(s)
Mechanical and Aerospace Engineering
International Standard Serial Number (ISSN)
1087-1357
Document Type
Article - Journal
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2015 American Society of Mechanical Engineers (ASME), All rights reserved.
Publication Date
01 Dec 2015
