Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors
Abstract
This study describes the effect of variations in shape and membrane thickness in capacitive pressure sensors. Specifically, square, rectangular and circular shapes were considered with three different membrane thicknesses. Capacitive changes and membrane deformations with respect to pressure variation were computed using the IntelliSuite simulation software, and the sensitivity of the sensor was assessed. Square-shaped pressure sensor with least membrane thickness was found to be more sensitive than the circular and rectangular shaped sensors, with the rectangular one showing the least sensitivity.
Recommended Citation
A. Sabet and X. J. Avula, "Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors," Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show - Nanotech Technical Proceedings (2006, Boston, MA), Nano Science and Technology Institute (NSTI), May 2006.
Meeting Name
2006 NSTI Nanotechnology Conference and Trade Show (2006: May 7-11, Boston, MA)
Department(s)
Mechanical and Aerospace Engineering
Document Type
Article - Conference proceedings
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2006 Nano Science and Technology Institute (NSTI), All rights reserved.
Publication Date
11 May 2006
