Analytical and Computational Solutions to Piezoelectric Bending: A Comparative Study

Abstract

Computational and analytical studies are conducted on piezoelectric beams of various materials in bending mode investigating the effect of variations in length and thickness on tip deflection that might be useful in MEMS actuators. Specifically, the materials considered are zinc oxide, poly vinylidene flouride, lead zirconate titanate, barium titanate, and piezoelectric sheet element. The computational solutions were obtained with the finite element analysis integrated into IntelliSuite (IntelliSense Corporation) software, and the analytical solutions were obtained with MATLAB. Results show that deflections are in closer agreement for beams of decreasing lengths and increasing thickness. It is noteworthy for the design of actuators that a large piezoelectric constant results in increased deflection.

Meeting Name

2007 NSTI Nanotechnology Conference and Trade Show (2007: May 20-24, Santa Clara, CA)

Department(s)

Mechanical and Aerospace Engineering

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2007 Nano Science and Technology Institute (NSTI), All rights reserved.

Publication Date

24 May 2007

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