Fabrication of 3D Microoptical Lenses in Photosensitive Glass Using Femtosecond Laser Micromachining
Abstract
We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) a second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing the great potential of using these microoptical lenses in lab-on-a-chip applications.
Recommended Citation
Y. Cheng et al., "Fabrication of 3D Microoptical Lenses in Photosensitive Glass Using Femtosecond Laser Micromachining," Applied Physics A: Materials Science and Processing, Springer, Jan 2006.
The definitive version is available at https://doi.org/10.1007/s00339-006-3672-3
Department(s)
Mechanical and Aerospace Engineering
Sponsor(s)
Air Force Research Laboratory (Wright-Patterson Air Force Base, Ohio)
National Science Foundation (U.S.)
Keywords and Phrases
Foturan Glass; Curved Surfaces; Hemispherical Lenses; Microoptical Cylindrical; Glass, Photosensitive
International Standard Serial Number (ISSN)
0947-8396
Document Type
Article - Journal
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2006 Springer, All rights reserved.
Publication Date
01 Jan 2006
