Laser-Assisted Synthesis of Diamond-Like Carbon from Cyclohexane Liquid
Abstract
Diamond-like carbon (DLC) films were synthesized by KrF excimer laser irradiation of single-crystal Si substrates immersed in a cyclohexane liquid. the deposition process was performed with a peak laser power density of about 10 8 W/cm 2 in open atmosphere at room temperature. Scanning electron microscopy (SEM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) studies showed diamond-like characteristics of the deposited films. Optical emission spectroscopy (OES) of laser-induced plasmas of cyclohexane indicated decomposition of the cyclohexane molecules. a mechanism based on the dissociation of the cyclohexane molecules and condensation of energetic carbon atoms into diamond-like films was proposed to explain the process.
Recommended Citation
Y. X. Han et al., "Laser-Assisted Synthesis of Diamond-Like Carbon from Cyclohexane Liquid," Proceedings of SPIE - The International Society for Optical Engineering, vol. 6107, article no. 61070P, Society of Photo-optical Instrumentation Engineers, May 2006.
The definitive version is available at https://doi.org/10.1117/12.644984
Department(s)
Materials Science and Engineering
Keywords and Phrases
Cyclohexane; Diamond-like carbon; OES; Raman; SEM; XPS
International Standard Book Number (ISBN)
978-081946149-0
International Standard Serial Number (ISSN)
0277-786X
Document Type
Article - Conference proceedings
Document Version
Final Version
File Type
text
Language(s)
English
Rights
© 2024 Society of Photo-optical Instrumentation Engineers, All rights reserved.
Publication Date
01 May 2006
