Characterization of the Nanoscale Microstructure of an Immersion Silver on Sputtered Copper

Abstract

Silver has grown its attraction of the scientists in microelectronic field recently. Electrochemical deposition of silver onto copper substrates by immersion method has been one of the keen topics. in this study, ethanol was used as the plating solution in which some chemicals were added. the silver deposits were characterized by a field emission scanning electron microscopy (FESEM), an atom force microscope (AFM), a transmission electron microscope (TEM) and a selected area electron diffraction (SAED). It was found that silver immersion using ethanol-Based bath has good coverage feature. the highlands of the copper substrate are coated by silver particles whose sizes are around 12 nm, but those sizes at low-lying lands are a little smaller.

Department(s)

Materials Science and Engineering

Keywords and Phrases

Copper; Immersion; Nanoparticles; Silver

International Standard Serial Number (ISSN)

0254-5861

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2024 Fujian Institute of Research of the Structure of Matter, All rights reserved.

Publication Date

15 Sep 2005

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