Abstract
BaxSr1-xTiO3 (BST), PbZrxTi1-xO3 (PZT) and two-layer PZT-BST films were prepared on Pt, Si(100) and Si(111) substrates by a sol-gel method. XRD analysis shows that the PZT films on the Si(111) substrates tended to be preferentially oriented in the (110) direction. The nondestructive readout of the state of ferroelectric polarization was investigated by three methods: the pyroelectric effect, the non-linearity of the capacitance and the field effect in MOS structures. It is shown that all three methods provide nondestructive readout, and the choice between them depends on the intended use.
Recommended Citation
V. Petrovsky et al., "Ferroelectric Films as a Fashion Object for Polycrystalline Film Investigation," Materials Research Society Symposium - Proceedings, vol. 472, pp. 251 - 256, Springer, Jan 1997.
The definitive version is available at https://doi.org/10.1557/proc-472-251
Department(s)
Materials Science and Engineering
International Standard Serial Number (ISSN)
0272-9172
Document Type
Article - Conference proceedings
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2024 Springer, All rights reserved.
Publication Date
01 Jan 1997
