Angle-Resolved XPS Analysis of Oxidized Polycrystalline Sic Surfaces

Abstract

The nature of surface oxide and of adsorbed hydrocarbons (or free carbon) on dense, polycrystalline SiC has been studied using angle-resolved x-ray photoelectron spectroscopy (XPS). The oxide appears to be very close to the composition of SiO2, and no evidence was found for a change in the composition with depth from the surface. The thicknesses of the SiO2 and the hydrocarbon layers were also estimated from expressions for the x-ray photoelectron intensity.

Department(s)

Materials Science and Engineering

International Standard Serial Number (ISSN)

0002-7812

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 1987 American Ceramic Society, All rights reserved.

Publication Date

01 May 1987

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