Oxygen Activity in Silicon Crystal Growth Chambers

Author

P. D. Ownby, Missouri University of Science and TechnologyFollow

Recommended Citation

P. D. Ownby, "Oxygen Activity in Silicon Crystal Growth Chambers," Seminar presented at Monsanto Industrial Chemicals Co., Electronics Div., (1981: Mar 17, St. Peters, Missouri), Mar 1981.

Department(s)

Materials Science and Engineering

Document Type

Video - Presentation

Document Version

Citation

File Type

text

Language(s)

English

Publication Date

01 Mar 1981