Observations on Ion Gauge Sensitivities to Various Gases

Author

P. D. Ownby, Missouri University of Science and TechnologyFollow
Thomas A. Flaim

Recommended Citation

P. D. Ownby and T. A. Flaim, "Observations on Ion Gauge Sensitivities to Various Gases," Journal of Vacuum Science and Technology, American Vacuum Society, Jan 1971.

Department(s)

Materials Science and Engineering

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 1971 American Vacuum Society, All rights reserved.

Publication Date

01 Jan 1971