Synthesis and Microstructural Characterization of Unsupported Nanocrystalline Zirconia Thin Films

Author

Brian P. Gorman
Harlan U. Anderson, Missouri University of Science and TechnologyFollow

Abstract

A polymeric precursor spin-coating technique is illustrated in which yttrium-stabilized zirconia (YSZ) thin films are produced on Si, Al2O3, and NaCl at temperatures less than 350°C. High-resolution transmission electron microscopy (HRTEM) examinations show that the YSZ films are nanocrystalline (grain size of less than 5 nm), fully dense, and have a stabilized cubic fluorite structure. Using the polymeric precursor spin coating method, unsupported nanocrystalline thin films of YSZ with thicknesses ranging from 30 to 1000 nm are prepared by transferring the films from a host substrate to metallic TEM grids with unsupported areas exceeding 1 mm2.

Recommended Citation

B. P. Gorman and H. U. Anderson, "Synthesis and Microstructural Characterization of Unsupported Nanocrystalline Zirconia Thin Films," Journal of the American Ceramic Society, John Wiley & Sons, Dec 2004.

The definitive version is available at https://doi.org/10.1111/j.1151-2916.2001.tb00762.x

Department(s)

Materials Science and Engineering

Keywords and Phrases

Synthesis; Zirconia; Thin films; Zirconium oxide

International Standard Serial Number (ISSN)

0002-7820; 1551-2916

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2004 John Wiley & Sons, All rights reserved.

Publication Date

01 Dec 2004