Compositional Profiling of Solution-deposited Lead Zirconate-titanate Thin Films by Radio-frequency Glow Discharge Atomic Emission Spectroscopy (rf-GD-AES)
Abstract
Depth-resolved elemental analysis of perovskite thin films based on lead zirconate-titanate (PZT) is performed by a relatively new technique; radio-frequency glow discharge atomic emission spectroscopy (rf-GD-AES). The technique provides in-depth composition information for the PZT layer, and underlying layers within the device architecture. Total film thicknesses of not, vert, similar1 μm are profiled in <30 s. Differences in pyrolysis conditions for two sol-gel produced films are easily identified based on the profiles of residual C, H, and O species. The technique is projected to be a valuable aid in the development of new electronic devices.
Recommended Citation
R. K. Marcus and R. W. Schwartz, "Compositional Profiling of Solution-deposited Lead Zirconate-titanate Thin Films by Radio-frequency Glow Discharge Atomic Emission Spectroscopy (rf-GD-AES)," Chemical Physics Letters, Elsevier, Feb 2000.
The definitive version is available at https://doi.org/10.1016/S0009-2614(00)00013-0
Department(s)
Materials Science and Engineering
Sponsor(s)
National Science Foundation (U.S.)
Keywords and Phrases
Compositional Depth Profiles; Lead Compounds; Lead Zirconate Titanate (PZT)
Document Type
Article - Conference proceedings
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2000 Elsevier, All rights reserved.
Publication Date
01 Feb 2000
