"The Removal of Surface Silica and Its Effect Upon Silicon Nitridation " by M. N. Rahaman and A. J. Moulson
 

The Removal of Surface Silica and Its Effect Upon Silicon Nitridation Kinetics

Editor(s)

Carter, C. B.

Department(s)

Materials Science and Engineering

Keywords and Phrases

Polymer Sciences; Industrial Chemistry/Chemical Engineering; Characterization and Evaluation Materials

International Standard Serial Number (ISSN)

0022-2461

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 1981 Springer Verlag, All rights reserved.

Publication Date

01 Jan 1981

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