Control of oxygen and carbon impurities in Czochralski-grown silicon by altering the standard atmosphere and materials
Ownby, P. D.
Materials Science and Engineering
M.S. in Ceramic Engineering
University of Missouri--Rolla
ix, 91 pages
© 1989 Paul Graham McLaughlin, All rights reserved.
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Full-text not available: Request this publication directly from Missouri S&T Library or contact your local library.http://merlin.lib.umsystem.edu/record=b2208657~S5
McLaughlin, Paul Graham, "Control of oxygen and carbon impurities in Czochralski-grown silicon by altering the standard atmosphere and materials" (1989). Masters Theses. 783.
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