Masters Theses

Control of oxygen and carbon impurities in Czochralski-grown silicon by altering the standard atmosphere and materials

Advisor(s)

Ownby, P. D.

Department(s)

Materials Science and Engineering

Degree Name

M.S. in Ceramic Engineering

Publisher

University of Missouri--Rolla

Publication Date

Summer 1989

Pagination

ix, 91 pages

Rights

© 1989 Paul Graham McLaughlin, All rights reserved.

Document Type

Thesis - Citation

File Type

text

Language

English

Thesis Number

T 5904

Print OCLC #

20846399

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