Masters Theses

Songping Wu

Keywords and Phrases

Surface morphology

Abstract

"This thesis investigates the use of femtosecond laser induced surface morphology on silicon wafer surface in water confinement. Unlike irradiation of silicon surfaces in the air, there are no laser induced periodic structures, but irregular roughness is formed when the silicon wafer is ablated under water. Interestingly, a particular parameter combination enables a smooth surface, which can improve the surface quality of micro-machining products. This thesis first investigates the single ablation and multi-pulse ablation processes in order to study the effects of laser parameters on ablation morphology, as well as the basic physics and mechanism of the laser-material interaction process under water...Next femtosecond laser direct writing process in water confinement is investigated...The unique discovery of a smoothly processed silicon surface in water confinement under certain laser parameter combinations may help improve laser direct micro-machining surface quality in industrial application"--Abstract, page iii.

Advisor(s)

Tsai, Hai-Lung

Committee Member(s)

Xiao, Hai, Dr.
Alofs, Darryl J.

Department(s)

Mechanical and Aerospace Engineering

Degree Name

M.S. in Mechanical Engineering

Publisher

Missouri University of Science and Technology

Publication Date

Spring 2008

Pagination

ix, 75 pages

Note about bibliography

Includes bibliographical references (pages 60-63).

Rights

© 2008 Songping Wu, All rights reserved.

Document Type

Thesis - Open Access

File Type

text

Language

English

Subject Headings

Laser pulses, Ultrashort
Lasers -- Industrial applications
Micromachining

Thesis Number

T 9374

Print OCLC #

261131186

Electronic OCLC #

218512220

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