On-line depth measurement of micro-scale laser drilled holes

Author

Rock Allen Powell

Abstract

"A micron-precision micro-hole depth detection scheme has been developed which utilizes a confocal structure and a photomultiplier tube as a photodetector. This scheme is experimentally confirmed to posses an accuracy of greater than 95% for micro-holes on the order of one-hundred microns in diameter and tens of microns in depth and could be easily be integrated for the control of industrial and research oriented laser micro-machining process"--Abstract, page iii.

Advisor(s)

Tsai, Hai-Lung

Committee Member(s)

Xiao, Hai, Dr.
Alofs, Darryl J.

Department(s)

Mechanical and Aerospace Engineering

Degree Name

M.S. in Mechanical Engineering

Publisher

Missouri University of Science and Technology

Publication Date

Summer 2009

Pagination

vi, 18 pages

Note about bibliography

Includes bibliographical references (pages 52-53).

Rights

© 2009 Rock Allen Powell, All rights reserved.

Document Type

Thesis - Open Access

File Type

text

Language

English

Subject Headings

Confocal microscopyLaser beam cuttingLasers -- Industrial applicationsMicrotechnologyOptical measurements

Thesis Number

T 9546

Print OCLC #

471874848

Electronic OCLC #

430495063

Recommended Citation

Powell, Rock Allen, "On-line depth measurement of micro-scale laser drilled holes" (2009). Masters Theses. 4691.
https://scholarsmine.mst.edu/masters_theses/4691