An Intelligent Dissolved Oxygen Microsensor System with Electrochemically Actuated Fluidics

Abstract

A new dissolved oxygen monitoring microsystem is proposed to achieve in situ intelligence of the self-calibration by using an electrochemically actuated fluidic system. the electrochemical actuation based on water electrolysis plays two critical roles in the proposed microsystem. First, the electrochemically generated gases serve as the calibrants for in situ 2-point calibration/ diagnosis procedure of the microsensor in a chip. Secondly, the electrochemical generation and collapse of gas bubbles provide a driving force of the bidirectional fluidic manipulation for sampling and dispensing of sample solution. a microsystem including a dissolved oxygen micromicroprobe, electrochemical actuators, and a fluidic structure are prepared by microfabrication technology and its performances are characterized. © 2004 IEEE.

Department(s)

Electrical and Computer Engineering

Keywords and Phrases

Bubble; Electrolysis; Hydrogen; Oxygen; Water vapor

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2024 Institute of Electrical and Electronics Engineers, All rights reserved.

Publication Date

01 Dec 2004

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