Creep and Hysteresis Compensation for Nanomanipulation Using Atomic Force Microscope
Abstract
In this paper, a novel scheme is presented to simultaneously compensate the inherent creep and hysteresis nonlinearities of a piezoelectric actuator while positioning the Atomic Force Microscope (AFM) tip. in order to mitigate these nonlinearities, creep and hysteresis phenomenon are first modeled separately by using the classical Prandtl-Ishlinskii (PI) operator. Then, a linear time-invariant (LTI) representation is obtained to identify the creep uncertainty and subsequently an adaptive control scheme is devised for the piezoelectric actuator to track a desired path in the presence of creep. an additional dynamic inversion loop is utilized by using an online approximator to offset the hysteresis effects without the need of identifying the parameters within the hysteresis model. Rigorous performance analysis is conducted using standard Lyapunov stability approach along with simulation results.
Recommended Citation
Q. Yang and J. Sarangapani, "Creep and Hysteresis Compensation for Nanomanipulation Using Atomic Force Microscope," Asian Journal of Control, Wiley-Blackwell, Mar 2009.
The definitive version is available at https://doi.org/10.1002/asjc.94
Department(s)
Electrical and Computer Engineering
Keywords and Phrases
AFM; Creep and Hysteresis Compensation; Dynamic Inversion; Nanomanipulation
International Standard Serial Number (ISSN)
1561-8625
Document Type
Article - Journal
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2009 Wiley-Blackwell, All rights reserved.
Publication Date
01 Mar 2009
