A Simple On-chip Self-diagnosis/self-calibration Method of Oxygen Microsensor Using Electrochemically Generated Bubbles
Abstract
An on-demand in situ self-diagnosis and self-calibration of biochemical sensors is indispensable for continuous and reliable monitoring. An on-chip electrochemical actuation method (water electrolysis) was employed to achieve this novel functionality. A simple fluidics chip including a polydimethylsiloxan (PDMS) channel layer and platinum actuation electrodes was designed and fabricated. The performance of this system was evaluated in combination with a commercial fiber optic oxygen sensor. The results obtained from the fluidics chip were compared to those obtained from a solution phase and a dry gas phase and the influence of water vapor and internal pressure was discussed. This method is expected to enable an on-demand in situ self-diagnosis and self-calibration of oxygen microsensor during real-time monitoring and to lead to an integrated system with on-chip, built-in intelligence.
Recommended Citation
J. Park et al., "A Simple On-chip Self-diagnosis/self-calibration Method of Oxygen Microsensor Using Electrochemically Generated Bubbles," Sensors and Actuators, B: Chemical, Elsevier, Jan 2005.
The definitive version is available at https://doi.org/10.1016/j.snb.2005.01.049
Department(s)
Electrical and Computer Engineering
Keywords and Phrases
Intelligent Sensor; Water Vapor; Oxygen; Electrolysis; Hydrogen
Document Type
Article - Journal
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2005 Elsevier, All rights reserved.
Publication Date
01 Jan 2005
