Measurement, Simulation and Mathematical Estimation of Magnetic Field Shielding Effectiveness of Sputtered Shielding Materials using Spiral Coils
Abstract
Recently, semiconductor devices are becoming more diverse and scaled down for various applications such as electronic devices, communication systems and automotive components. Such applications can utilize sputtered shielding structures to solve electromagnetic interference (EMI) issues. To reduce the EMI issues, copper and nickel are commonly used as sputtered shielding materials. To analyze the shielding effectiveness, we applied the Schelkunoff's theory. For the verification of the Schelkunoff's theory, we simulated and measured the shielding effectiveness of copper and nickel at the frequency range between 100 kHz and 10 MHz using two identical coils.
Recommended Citation
K. Song et al., "Measurement, Simulation and Mathematical Estimation of Magnetic Field Shielding Effectiveness of Sputtered Shielding Materials using Spiral Coils," Proceedings of the 2018 IEEE Symposium on Electromagnetic Compatibility, Signal Integrity and Power Integrity (2018, Long Beach, CA), Institute of Electrical and Electronics Engineers (IEEE), Aug 2018.
The definitive version is available at https://doi.org/10.1109/EMCSI.2018.8495438
Meeting Name
2018 IEEE Symposium on Electromagnetic Compatibility, Signal Integrity and Power Integrity, EMC, SI and PI 2018 (2018: Jul. 30-Aug. 3, Long Beach, CA)
Department(s)
Electrical and Computer Engineering
Research Center/Lab(s)
Electromagnetic Compatibility (EMC) Laboratory
Keywords and Phrases
Copper; Magnetic field; Nickel; Schelkunoff's theory; Shielding effectiveness; Sputtering
International Standard Book Number (ISBN)
978-153866621-0
Document Type
Article - Conference proceedings
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2018 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.
Publication Date
01 Aug 2018
