Cascaded Fiber-Optic Intrinsic Fabry-Perot Interferometers Fabricated by Femtosecond Laser Irradiation


An all-in-fiber prototype optofluidic device was fabricated by femtosecond laser irradiation and subsequent selective chemical wet etching. Horizontal and vertical microchannels can be flexibly created into an optical fiber to form a fluidic cavity with inlets/outlets. The fluidic cavity also functions as an optical Fabry-Perot cavity in which the filled liquid can be probed. The assembly-free microdevice exhibited a fringe visibility of 20 dB and was demonstrated for measurement of the refractive index of the filling liquids. The proposed all-in-fiber optofluidic micro device is attractive for chemical and biomedical sensing because it is flexible in design, simple to fabricate, mechanically robust, and miniaturized in size.

Meeting Name

SPIE Photonics West (2013: Feb. 2-7 , San Francisco, CA)


Electrical and Computer Engineering


National Energy Technology Laboratory (U.S.)

Keywords and Phrases

Optical fibers; Refractive index; Ultrashort pulses; Chemical etching; Chemical wet etching; Fluidic cavity; Fringe visibilities; Mechanically robust; Optofluidic devices; Optofluidic sensors; Vertical microchannel; Optical fiber fabrication; Glass fiber; Devices; Equipment design; Genetic procedures; Laser; Light related phenomena; Microfluidic analysis; Microtechnology; Procedures; Biosensing Techniques; Equipment Design; Lasers; Microfluidic Analytical Techniques; Microtechnology; Optical Fibers; Optical Phenomena

Document Type

Article - Conference proceedings

Document Version


File Type





© 2013 SPIE, All rights reserved.

Publication Date

01 Feb 2013

This document is currently not available here.