Broadband Measurement of ESD Risetimes to Distinguish between Different Discharge Mechanisms
Different discharge mechanisms are possible for ESD (electrostatic discharge) below 2 kV breakdown voltage as a function of the parameters gap distance, breakdown voltage, electrode material and gas pressure. In this paper, risetime measurement data of electrostatic discharges, measured at about 8 GHz bandwidth, are presented as a function of these parameters. Electrode SEM photographs (scanning electron microscope) helps to understand the influence of electrode surface. This provides information about the development of ESD and helps to increase their reproducibility.
S. P. Bönisch et al., "Broadband Measurement of ESD Risetimes to Distinguish between Different Discharge Mechanisms," Proceedings of the Electrical Overstress/Electrostatic Discharge Symposium (2001, Portland, OR), pp. 371-382, Institute of Electrical and Electronics Engineers (IEEE), Sep 2001.
Electrical Overstress/Electrostatic Discharge Symposium (2001: Sep. 11-13, Portland, OR)
Electrical and Computer Engineering
Keywords and Phrases
Bandwidth; Charge Carriers; Electric Breakdown; Electric Potential; Electrodes; Electrostatic Devices; Electrostatic Discharge; Electrostatics; Laser Optics; Scanning Electron Microscopy; Surface Discharges; Broadband Measurements; Discharge Mechanisms; Electrode Material; Electrode Surfaces; Electrostatic Measurements; Gap Distances; Measurement Data; Reproducibilities; Electric Discharges; Reproducibility of Results; Voltage
International Standard Book Number (ISBN)
International Standard Serial Number (ISSN)
Article - Conference proceedings
© 2001 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.
01 Sep 2001