Broadband Measurement of ESD Risetimes to Distinguish between Different Discharge Mechanisms

Abstract

Different discharge mechanisms are possible for ESD (electrostatic discharge) below 2 kV breakdown voltage as a function of the parameters gap distance, breakdown voltage, electrode material and gas pressure. In this paper, risetime measurement data of electrostatic discharges, measured at about 8 GHz bandwidth, are presented as a function of these parameters. Electrode SEM photographs (scanning electron microscope) helps to understand the influence of electrode surface. This provides information about the development of ESD and helps to increase their reproducibility.

Meeting Name

Electrical Overstress/Electrostatic Discharge Symposium (2001: Sep. 11-13, Portland, OR)

Department(s)

Electrical and Computer Engineering

Keywords and Phrases

Bandwidth; Charge Carriers; Electric Breakdown; Electric Potential; Electrodes; Electrostatic Devices; Electrostatic Discharge; Electrostatics; Laser Optics; Scanning Electron Microscopy; Surface Discharges; Broadband Measurements; Discharge Mechanisms; Electrode Material; Electrode Surfaces; Electrostatic Measurements; Gap Distances; Measurement Data; Reproducibilities; Electric Discharges; Reproducibility of Results; Voltage

International Standard Book Number (ISBN)

978-1-5853-7039-9

International Standard Serial Number (ISSN)

0739-5159

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2001 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.

Publication Date

01 Sep 2001

Link to Full Text

Share

 
COinS