Abstract
This paper documents the development, characterization, and application of a high-resolution thin-film magnetic-field probe. Probe diameter ranged from 5-μm to 100-μm. The 100-μm probe exhibits a 250-7μm improvement in spatial resolution compared to a conventional loop probe, measured at a height of 250 μm over differential traces with a 118-μm spacing. Electric field rejection was improved using shielding and using a 180-degree hybrid junction to separate common-mode (electric field) and differential-mode (primarily magnetic field) coupling. A network analyzer with narrow band filtering was used to detect the relatively weak signal from the probe and to allow detection of phase information. An application of the probe is demonstrated where the probe is used to identify the magnitude and phase of magnetic fields produced by currents in very closely-spaced IC package pins.
Recommended Citation
S. Li et al., "Development and Application of a High-Resolution Thin-Film Probe," Proceedings of the IEEE International Symposium on Electromagnetic Compatibility (2007, Honolulu, HI), Institute of Electrical and Electronics Engineers (IEEE), Jan 2007.
The definitive version is available at https://doi.org/10.1109/ISEMC.2007.47
Meeting Name
IEEE International Symposium on Electromagnetic Compatibility, EMC 2007 (2007: Jul. 9-13, Honolulu, HI)
Department(s)
Electrical and Computer Engineering
Second Department
Materials Science and Engineering
Research Center/Lab(s)
Electromagnetic Compatibility (EMC) Laboratory
Keywords and Phrases
Probe Antennas; Scanning Antennas; Electromagnetic compatibility; Electromagnetic interference; Thin film devices
International Standard Book Number (ISBN)
1-4244-1349-4
International Standard Serial Number (ISSN)
2158-110X
Document Type
Article - Conference proceedings
Document Version
Final Version
File Type
text
Language(s)
English
Rights
© 2007 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.
Publication Date
01 Jan 2007
