In the reported experiments, plasma polymerization of tetrafluoroethylene (TFE), perfluoro-2-butyl-tetrahydrofuran (PFBTHF), ethylene, and styrene were investigated in various combinations of monomer flow rates and discharge wattages for the substrate temperature range of minus 50 to 80 degree C. The polymer deposition rates can be generally expressed by k//o equals Ae** minus **b**t, where k//o is the specific deposition rate given by k//o equals (deposition rate)/(mass flow rate of monomer), A is the preexponential factor representing the extrapolated value of k//o at zero absolute temperature, and b is the temperature-dependence coefficient. It was found that the value of b is not dependent on the condensability of monomer but depends largely on the group of monomer; that is, perfluorocarbons versus hydrocarbons. The values of A are dependent on domains of plasma polymerization. The kinetic equation is discussed in view of the bicyclic rapid step-growth polymerization mechanisms.
H. Yasuda and C. Wang, "PLASMA POLYMERIZATION INVESTIGATED BY THE SUBSTRATE TEMPERATURE DEPENDENCE.," Journal of polymer science. Part A-1, Polymer chemistry, vol. 23, no. 1, pp. 87 - 106, Wiley, Jan 1985.
The definitive version is available at https://doi.org/10.1002/pol.1985.170230110
Mechanical and Aerospace Engineering
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01 Jan 1985