Unique Beryllium Carbide Thin Film: Synthesis, Chemical and Thermal Characterizations

Abstract

Plasma-deposited coatings containing beryllium in excess of 50 atomic percent and oxygen content <5 atomic percent would meet the requirements for the outermost coating, the outer ablator of the multilayered microsphere for inertial confinement fusion (ICF). Films containing a Be2C composite with Be contents as high as 75 atomic percent (O<2 atomic percent) have been deposited on a variety of substrates via magnetron sputtering of Be into a methane/argon plasma. The elemental composition was controlled by adjusting the methane/At flow rate ratio during the deposition process. The films were characterized by Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), neutron diffraction (ND), differential thermal analysis (DTA), and thermogravimetric analysis (TGA).

Department(s)

Chemical and Biochemical Engineering

Second Department

Chemistry

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2000 American Nuclear Society (ANS), All rights reserved.

Publication Date

01 Jan 2000

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