Title

Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors

Abstract

This study describes the effect of variations in shape and membrane thickness in capacitive pressure sensors. Specifically, square, rectangular and circular shapes were considered with three different membrane thicknesses. Capacitive changes and membrane deformations with respect to pressure variation were computed using the IntelliSuite simulation software, and the sensitivity of the sensor was assessed. Square-shaped pressure sensor with least membrane thickness was found to be more sensitive than the circular and rectangular shaped sensors, with the rectangular one showing the least sensitivity.

Meeting Name

2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings (2006, Boston, MA)

Department(s)

Mechanical and Aerospace Engineering

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2006 Nano Science and Technology Institute (NSTI), All rights reserved.

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