Angle-Resolved XPS Analysis of Oxidized Polycrystalline Sic Surfaces
The nature of surface oxide and of adsorbed hydrocarbons (or free carbon) on dense, polycrystalline SiC has been studied using angle-resolved x-ray photoelectron spectroscopy (XPS). The oxide appears to be very close to the composition of SiO2, and no evidence was found for a change in the composition with depth from the surface. The thicknesses of the SiO2 and the hydrocarbon layers were also estimated from expressions for the x-ray photoelectron intensity.
M. N. Rahaman and L. C. De Jonghe, "Angle-Resolved XPS Analysis of Oxidized Polycrystalline Sic Surfaces," American Ceramic Society Bulletin, vol. 66, no. 5, pp. 782-785, American Ceramic Society, May 1987.
Materials Science and Engineering
International Standard Serial Number (ISSN)
Article - Journal
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