Title

The Removal of Surface Silica and Its Effect Upon Silicon Nitridation Kinetics

Editor(s)

Carter, C. B.

Department(s)

Materials Science and Engineering

Keywords and Phrases

Polymer Sciences; Industrial Chemistry/Chemical Engineering; Characterization and Evaluation Materials

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 1981 Springer Verlag, All rights reserved.


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