The Removal of Surface Silica and Its Effect Upon Silicon Nitridation Kinetics
Carter, C. B.
M. N. Rahaman and A. J. Moulson, "The Removal of Surface Silica and Its Effect Upon Silicon Nitridation Kinetics," Journal of Materials Science, Springer Verlag, Jan 1981.
The definitive version is available at http://dx.doi.org/10.1007/BF00542400
Materials Science and Engineering
Keywords and Phrases
Polymer Sciences; Industrial Chemistry/Chemical Engineering; Characterization and Evaluation Materials
Article - Journal
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