Masters Theses
Abstract
"A micron-precision micro-hole depth detection scheme has been developed which utilizes a confocal structure and a photomultiplier tube as a photodetector. This scheme is experimentally confirmed to posses an accuracy of greater than 95% for micro-holes on the order of one-hundred microns in diameter and tens of microns in depth and could be easily be integrated for the control of industrial and research oriented laser micro-machining process"--Abstract, page iii.
Advisor(s)
Tsai, Hai-Lung
Committee Member(s)
Xiao, Hai, Dr.
Alofs, Darryl J.
Department(s)
Mechanical and Aerospace Engineering
Degree Name
M.S. in Mechanical Engineering
Publisher
Missouri University of Science and Technology
Publication Date
Summer 2009
Pagination
vi, 18 pages
Note about bibliography
Includes bibliographical references (pages 52-53).
Rights
© 2009 Rock Allen Powell, All rights reserved.
Document Type
Thesis - Open Access
File Type
text
Language
English
Subject Headings
Confocal microscopy
Laser beam cutting
Lasers -- Industrial applications
Microtechnology
Optical measurements
Thesis Number
T 9546
Print OCLC #
471874848
Electronic OCLC #
430495063
Link to Catalog Record
Recommended Citation
Powell, Rock Allen, "On-line depth measurement of micro-scale laser drilled holes" (2009). Masters Theses. 4691.
https://scholarsmine.mst.edu/masters_theses/4691
