Decoupling Control Strategy of Magnetic Levitation Planar Motor
There is tight electromagnetic and mechanical coupling among 6-degree of freedom (DOF) motions of magnetic levitation planar motor for photolithography. For decoupling control of the 6-DOF motions, this paper presents the current-controlled model of linear motors as the electromagnetic actuators, the decoupled kinetics model based on the modal forces, and the decoupling control strategy of the planar motor. The 6-DOF kinetics models are successfully decoupled by the modal forces and become simple 2nd order linear systems. The X position servo controller of the prototype is designed. The simulation results show that the controller proposed makes the decoupled X position control with the disired performaces and the control system has good immunity and robust stability.
G. Zhou et al., "Decoupling Control Strategy of Magnetic Levitation Planar Motor," Zhongguo Dianji Gongcheng Xuebao/Proceedings of the Chinese Society of Electrical Engineering, vol. 29, no. 12, pp. 81-86, Chinese Society for Electrical Engineering, Apr 2009.
Electrical and Computer Engineering
Keywords and Phrases
Engineering Exhibitions; Linear Systems; Magnetic Levitation; Magnetic Levitation Vehicles; Motors; Controlled Models; Decoupling Control Strategies; Decoupling Controls; Degree of Freedom (dof); Electro-Magnetic Actuators; Kinetics Models; Mechanical Couplings; Modal Forces; Planar Motor; Position Servos; Robust Stabilities; Servo Controller; Simulation Results; Controllers
International Standard Serial Number (ISSN)
Article - Journal
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