Title

Decoupling Control Strategy of Magnetic Levitation Planar Motor

Abstract

There is tight electromagnetic and mechanical coupling among 6-degree of freedom (DOF) motions of magnetic levitation planar motor for photolithography. For decoupling control of the 6-DOF motions, this paper presents the current-controlled model of linear motors as the electromagnetic actuators, the decoupled kinetics model based on the modal forces, and the decoupling control strategy of the planar motor. The 6-DOF kinetics models are successfully decoupled by the modal forces and become simple 2nd order linear systems. The X position servo controller of the prototype is designed. The simulation results show that the controller proposed makes the decoupled X position control with the disired performaces and the control system has good immunity and robust stability.

Department(s)

Electrical and Computer Engineering

Keywords and Phrases

Engineering Exhibitions; Linear Systems; Magnetic Levitation; Magnetic Levitation Vehicles; Motors; Controlled Models; Decoupling Control Strategies; Decoupling Controls; Degree of Freedom (dof); Electro-Magnetic Actuators; Kinetics Models; Mechanical Couplings; Modal Forces; Planar Motor; Position Servos; Robust Stabilities; Servo Controller; Simulation Results; Controllers

International Standard Serial Number (ISSN)

0258-8013

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

Chinese

Rights

© 2009 Chinese Society for Electrical Engineering, All rights reserved.

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